Lithographic apparatus and method for its use

Details Lithographic apparatus and method for its use Lithographic apparatus and method for its use

2006-12-12

2006-12-12

Mathews, Alan (Department: 2851)

Photocopying

Projection printing and copying cameras

Step and repeat

C355S067000, C355S077000, C700S121000

Reexamination Certificate

active

07148954

ABSTRACT:
An apparatus and method for imaging a pattern onto a substrate is described. A recipe for producing an image includes optional tool-type information. Where tool-type information indicates that the recipe pertains to a different tool type, the apparatus makes adjustments to its imaging settings in order to emulate performance of the different tool type.

REFERENCES:
patent: 6263255 (2001-07-01), Tan et al.
patent: 2003/0013213 (2003-01-01), Takano
patent: 2004/0088071 (2004-05-01), Kouno et al.
patent: 2005/0206850 (2005-09-01), Shimizu et al.

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