Lithographic apparatus and method for calibrating the same

Details Lithographic apparatus and method for calibrating the same Lithographic apparatus and method for calibrating the same

2007-11-06

2007-11-06

Nguyen, Henry Hung (Department: 2851)

Photocopying

Projection printing and copying cameras

Step and repeat

C355S072000, C355S075000

Reexamination Certificate

active

11179665

ABSTRACT:
Lithographic apparatus includes a substrate table and a motion control system for controlling a movement of the substrate table. The motion control system includes at least 3 position detectors constructed for detecting a position of the substrate table. For measuring a position and orientation of the substrate table, each position detector comprises an optical encoder of a single dimensional or multi dimensional type, the optical encoders being arranged for providing together at least 6 position values, at least one position value being provided for each of the 3 dimensions. Some of the optical encoders may be connected to the substrate table at different locations in the 3 dimensional coordinate system. The motion control system is arranged to calculate the position of the substrate table in the 3 dimensional coordinate system from a subset of at least 3 of the 6 position values and to calculate an orientation of the substrate table with respect to the coordinate system from another subset of at least 3 of the 6 position values. Further, a method for calibrating the position detectors is presented.

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European Search Report issued for European Patent Application No. 05076665.8-2222, dated Feb. 10, 2006.
Singapore Patent Office Communication—Invitation to Respond to Written Opinion dated Aug. 14, 2006.
Australian Written Opinion and Search Report mailed Jul. 6, 2006.

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