Photocopying – Projection printing and copying cameras – Detailed holder for photosensitive paper
Reexamination Certificate
2005-12-28
2009-12-01
Mathews, Alan A (Department: 2851)
Photocopying
Projection printing and copying cameras
Detailed holder for photosensitive paper
C355S053000, C361S234000, C361S235000
Reexamination Certificate
active
07626681
ABSTRACT:
According to an aspect of the present invention, there is provided a lithographic apparatus that includes a substrate carrier arranged to hold a substrate in position using an electrostatic force. The substrate carrier is provided with an integral power source. The apparatus also includes a substrate table for holding the substrate carrier.
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Pellens Rudy Jan Maria
Sutedja Budiman
Van Den Heuvel Johannes Paulus Adrianus Maria
Van Dijk Paulus Wilhelmus Leonardus
ASML Netherlands B.V.
Mathews Alan A
Pillsbury Winthrop Shaw & Pittman LLP
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