Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate
2006-09-26
2006-09-26
Rutledge, D. (Department: 2851)
Photocopying
Projection printing and copying cameras
Step and repeat
C355S072000, C355S075000, C318S640000, C318S649000, C250S492200, C250S548000, C430S030000
Reexamination Certificate
active
07113256
ABSTRACT:
A lithographic apparatus includes an illumination system configured to provide a beam of radiation, a first support structure configured to support a patterning device, a second support that includes a substrate holder for holding a substrate, a projection system configured to project the patterned beam of radiation onto the substrate, and a servo unit configured to position the substrate holder. The apparatus further includes a sensor unit configured to determine a distance of at least one location point on the surface of the substrate relative to a reference plane, a memory unit configured to store surface information of the substrate based on respective distances of corresponding location points on the substrate surface, and a calculating unit configured to determine a feed-forward set-point signal based on the stored surface information, such that the feed-forward set-point signal is forwardly fed to the servo unit in order to position the substrate holder.
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Boonman Marcus Emile Joannes
Butler Hans
Van Den Biggelaar Petrus Marinus Christianus Maria
ASML Netherlands B.V.
Pillsbury Winthrop Shaw & Pittman LLP
Rutledge D.
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