Lithographic apparatus and device manufacturing method with...

Details Lithographic apparatus and device manufacturing method with... Lithographic apparatus and device manufacturing method with...

2011-01-11

2011-01-11

Glick, Edward J (Department: 2882)

Photocopying

Projection printing and copying cameras

Detailed holder for original

Reexamination Certificate

active

07869003

ABSTRACT:
A reticle gripper to hold a reticle of a lithographic apparatus is presented. The reticle gripper includes three gripper structures to contact the surface of the reticle. Each of the three gripper structures determines a position with respect to the reticle gripper of one of the points on the surface of the reticle.

REFERENCES:
patent: 3319951 (1967-05-01), Seelig
patent: 4776684 (1988-10-01), Schmidt-Kaler
patent: 6172738 (2001-01-01), Korenaga et al.
patent: 2003/0162101 (2003-08-01), Heerens et al.
patent: 09-008103 (1997-01-01), None
patent: 2001-085494 (2001-03-01), None
patent: 2002-203782 (2002-07-01), None
patent: 2004-535681 (2004-11-01), None
patent: 2005-045253 (2005-02-01), None
patent: 2005-235890 (2005-09-01), None
patent: 2003-017344 (2003-02-01), None
Office Action in related Japanese Application 2007-176951 mailed Sep. 16, 2010.

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