Photocopying – Projection printing and copying cameras – Methods
Reexamination Certificate
2005-03-21
2010-10-12
Kim, Peter B (Department: 2882)
Photocopying
Projection printing and copying cameras
Methods
Reexamination Certificate
active
07812930
ABSTRACT:
A method and device for programming an array of individually controllable elements configured to impart a beam with a pattern. For example, the method can be suitable for use in a lithographic apparatus. The method includes generating first data representing a first pattern, generating second data representing a second pattern, writing the first data to a first buffer, and reading the first data from the first buffer to program the array of individually controllable elements to display the first pattern, while writing the second data to a second buffer in parallel.
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De Jager Pieter Willem Herman
Hoeks Martinus Hendricus Hendricus
Kessels Lambertus Gerardus Maria
Morselt Frank Anton
Van Den Akker Theodorus Leonardus
ASML Netherlands B.V.
Kim Peter B
Liu Chia-how Michael
Sterne Kessler Goldstein & Fox P.L.L.C.
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