Lithographic apparatus and device manufacturing method using...

Details Lithographic apparatus and device manufacturing method using... Lithographic apparatus and device manufacturing method using...

2005-12-20

2008-10-21

Rutledge, Della J. (Department: 2851)

Photocopying

Projection printing and copying cameras

Step and repeat

C355S067000, C378S034000, C378S035000

Reexamination Certificate

active

07440078

ABSTRACT:
A lithographic system combining an interference exposure unit and a lithography unit. The lithography unit can comprise an array of individually controllable elements. The lithography system can be arranged such that a pitch of the lines exposed by the interference exposure unit is an integer multiple of a size of an exposure area of the lithography unit corresponding to a single individually controllable element.

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