Photocopying – Projection printing and copying cameras – Illumination systems or details
Reexamination Certificate
2008-06-10
2008-06-10
Mathews, Alan (Department: 2851)
Photocopying
Projection printing and copying cameras
Illumination systems or details
C355S053000, C355S077000, C430S005000
Reexamination Certificate
active
07385677
ABSTRACT:
A system and method are used to limit a proportion of a programmable patterning means used to pattern a substrate. This is done such that a size of a repeated pattern to be exposed on the substrate is an integer multiple of a size of a pattern exposed on the substrate by the patterned beam.
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ASML Netherlands B.V.
Mathews Alan
Sterne Kessler Goldstein & Fox P.L.L.C.
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