Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate
2005-06-08
2010-06-22
Chea, Thorl (Department: 1795)
Photocopying
Projection printing and copying cameras
Step and repeat
C430S067000
Reexamination Certificate
active
07742148
ABSTRACT:
First pluralities of radiation spots generated by an array of individually controllable elements are exposed on a substrate. The radiation spots are equally spaced across an entire area of the substrate to be exposed. The substrate is then shifted relative to the array of individually controllable elements in a direction perpendicular to a scanning direction of the substrate. Second pluralities of radiation spots generated by the array of individually controllable elements are alternatingly formed on the substrate with respect to each of the first plurality of spots.
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ASML Netherlands B.V.
Chea Thorl
Sterne Kessler Goldstein & Fox P.L.L.C.
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