Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate
2007-06-19
2007-06-19
Mathews, Alan (Department: 2851)
Photocopying
Projection printing and copying cameras
Step and repeat
C355S068000, C355S077000
Reexamination Certificate
active
11150882
ABSTRACT:
A lithographic apparatus comprises an illumination system, an array of individually controllable elements, a projection system, a substrate table, and a sensor system. The illumination system supplies a beam of radiation. The array of individually controllable elements patterns the beam. The projection system projects the patterned beam onto a target plane, the patterned beam comprising an array of radiation spots. The substrate table supports a substrate, such that a target surface of the substrate is substantially coincident with the target plane. The sensor system comprises an array of detector elements arranged to receive at least one of the spots. The sensor system measures an energy of the or each received spot and provides an output signal indicative of the energy of the or each received spot.
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Boon Eduardus Johannes Gerardus
Bruinsma Anastasius Jacobus Anicetus
Lof Joeri
Venema Willem Jurrianus
ASML Netherlands B.V.
Mathews Alan
Sterne Kessler Goldstein & Fox P.L.L.C.
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