Photocopying – Projection printing and copying cameras – Detailed holder for photosensitive paper
Reexamination Certificate
2006-09-12
2006-09-12
Perkey, W. B. (Department: 2851)
Photocopying
Projection printing and copying cameras
Detailed holder for photosensitive paper
Reexamination Certificate
active
07106420
ABSTRACT:
The present invention relates to a lithographic apparatus including a projection system configured to project a patterned radiation beam onto a target portion of a substrate held on a substrate support, the patterned beam of radiation being patterned with a patterning device held by a patterning device support. The lithographic apparatus includes an exchangeable object handling apparatus for exchanging an exchangeable object with a exchangeable object station and a support, the exchangeable object being one of the substrate and the patterning device and the support being one of the substrate support and the patterning device support, the exchangeable object handling apparatus including an intermediate holding device for holding an exchangeable object, which intermediate holding device can interact with the support to place an exchangeable object on or take an exchangeable object from the support, and a robot which can exchange an exchangeable object with the support, the intermediate holding device and said exchangeable object station.
REFERENCES:
patent: 4886412 (1989-12-01), Wooding et al.
patent: 2004/0075822 (2004-04-01), Hattori
patent: 2005/0057733 (2005-03-01), Owen et al.
patent: 2005/0058446 (2005-03-01), Plug
patent: 2005/0073667 (2005-04-01), An et al.
Bijvoet Dirk Jan
Hoogkamp Jan Frederik
Kuit Jan Jaap
Maquine Johannes
Segers Hubert Marie
ASML Netherlands B.V.
Nelson Vivian
Perkey W. B.
Pillsbury Winthrop Shaw & Pittman LLP
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