Lithographic apparatus and device manufacturing method

Details Lithographic apparatus and device manufacturing method Lithographic apparatus and device manufacturing method

2006-07-04

2006-07-04

Mathews, Alan (Department: 2851)

Photocopying

Projection printing and copying cameras

Step and repeat

C355S072000, C318S611000, C318S623000

Reexamination Certificate

active

07072025

ABSTRACT:
A lithographic projection apparatus in which a reaction force is generated between a balance mass and a substrate table. The balance mass is elastically coupled to the base frame with a suspension eigenfrequency of between 0.3 and 10 Hz.

REFERENCES:
patent: 5815246 (1998-09-01), Sperling et al.
patent: 5844666 (1998-12-01), Van Engelen et al.
patent: 5953105 (1999-09-01), Van Engelen et al.
patent: 6262796 (2001-07-01), Loopstra et al.
patent: 6449030 (2002-09-01), Kwan
patent: 6906786 (2005-06-01), Cox et al.
patent: 2001/0006762 (2001-07-01), Kwan et al.
patent: 2002/0012108 (2002-01-01), Hara
patent: 0 502 578 (1992-09-01), None
patent: 1 111 470 (2001-06-01), None

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