Lithographic apparatus and device manufacturing method

Details Lithographic apparatus and device manufacturing method Lithographic apparatus and device manufacturing method

2005-11-29

2005-11-29

Kim, Peter B. (Department: 2851)

Photocopying

Projection printing and copying cameras

Step and repeat

C355S072000, C277S345000

Reexamination Certificate

active

06970230

ABSTRACT:
A linear seal seals over a slot formed in a wall of a vacuum chamber of a lithographic projection apparatus. The linear seal includes an elongate sealing member which is locally displaced from the slot at a selectable position such that conduits may pass from outside of the vacuum chamber to the inside of the vacuum chamber at the local displacement of the elongate sealing member.

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patent: 2002/0079464 (2002-06-01), Driessen et al.
patent: 1 052 553 (2000-11-01), None
patent: 58-044719 (1983-03-01), None
patent: 2001-085291 (2001-03-01), None

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