Lithographic apparatus and device manufacturing method

Photocopying – Projection printing and copying cameras – Step and repeat

Reexamination Certificate

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

C355S072000, C318S611000, C318S623000

Reexamination Certificate

active

06906786

ABSTRACT:
A lithographic projection apparatus in which a reaction force is generated between a balance mass and a substrate table. The balance mass is elastically coupled to the base frame with a suspension eigenfrequency of between 0.3 and 10 Hz.

REFERENCES:
patent: 5815246 (1998-09-01), Sperling et al.
patent: 5844666 (1998-12-01), Van Engelen et al.
patent: 5953105 (1999-09-01), Van Engelen et al.
patent: 6262796 (2001-07-01), Loopstra et al.
patent: 6449030 (2002-09-01), Kwan
patent: 2001/0006762 (2001-07-01), Kwan et al.
patent: 2002/0012108 (2002-01-01), Hara
patent: 0 502 578 (1992-09-01), None
patent: 1 111 470 (2001-06-01), None
patent: 1 111 470 (2001-06-01), None

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Lithographic apparatus and device manufacturing method does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Lithographic apparatus and device manufacturing method, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Lithographic apparatus and device manufacturing method will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-3517461

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.