Lithographic apparatus and device manufacturing method

Details Lithographic apparatus and device manufacturing method Lithographic apparatus and device manufacturing method

2005-08-16

2005-08-16

Nguyen, Henry Hung (Department: 2851)

Photocopying

Projection printing and copying cameras

Step and repeat

C355S067000

Reexamination Certificate

active

06930755

ABSTRACT:
Grayscales are formed by simultaneously projecting two or more patterned projection beams onto the substrate, each of which has a different pattern and a different intensity.

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