Lithographic apparatus and device manufacturing method

Details Lithographic apparatus and device manufacturing method Lithographic apparatus and device manufacturing method

2005-06-07

2005-06-07

Nguyen, Henry Hung (Department: 2851)

Photocopying

Projection printing and copying cameras

Detailed holder for photosensitive paper

C355S030000, C355S053000

Reexamination Certificate

active

06903805

ABSTRACT:
In a lithographic projection apparatus, a slider is provided for motion of the substrate table or mask table. The slider is supported on a gas-bearing and separates a region at atmospheric pressure from a vacuum space region. A differential pressure pump is provided to maintain the pressure difference in the presence of the gas-bearing. A pressure compensation vessel is provided on top of the slider and also contains a vacuum. Over most of the area of the slider, the pressure on its opposed first and second sides is the same and so deformation of the slider is avoided. The sidewalls of the pressure compensation vessel transmit the external gas pressure to the slider such that they are in line with the forces of the gas-bearing.

REFERENCES:
patent: 4191385 (1980-03-01), Fox et al.
patent: 6317479 (2001-11-01), Chiba et al.
patent: 6445440 (2002-09-01), Bisschops et al.
patent: 6639650 (2003-10-01), Shirasaki
patent: 1052551 (2000-11-01), None
patent: 1098225 (2001-05-01), None
patent: 2001267200 (2001-09-01), None
patent: WO 01/84241 (2001-11-01), None

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