Photocopying – Projection printing and copying cameras – With temperature or foreign particle control
Reexamination Certificate
2005-12-20
2005-12-20
Fuller, Rodney (Department: 2851)
Photocopying
Projection printing and copying cameras
With temperature or foreign particle control
C355S053000
Reexamination Certificate
active
06977713
ABSTRACT:
A lithographic apparatus includes an illumination system for providing a beam of radiation, a support structure constructed to support a patterning device, which serves to impart the projection beam with a pattern in its cross-section, a substrate table for holding a substrate, a projection system that projects the patterned beam onto a target portion of the substrate, and a reference frame with a position sensor and the substrate being located thereon. The apparatus further includes a heat transport system having a heating element, in thermal interaction with at least one of the projection system and the reference frame, for heat transport to or from at least one of the projection system and the reference frame, wherein the heat transport system, is coupled to a further frame which is mechanically isolated from the reference frame.
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Bartray Pertrus Rutgerus
Box Wilhelmus Josephus
Leenders Martinus Hendrikus Antonius
Luttikhuis Bernardus Antonius Johannes
Van Der Wijst Marc Wilhelmus Maria
ASML Netherlands B.V.
Fuller Rodney
Pillsbury Winthrop Shaw & Pittman LLP
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