Lithographic apparatus and device manufacturing method

Details Lithographic apparatus and device manufacturing method Lithographic apparatus and device manufacturing method

2005-03-22

2005-03-22

Fuller, Rodney (Department: 2851)

Photocopying

Projection printing and copying cameras

Step and repeat

C355S067000

Reexamination Certificate

active

06870601

ABSTRACT:
A lithographic apparatus uses the control signal from a computer to drive two spatial light modulators to pattern two separate projection beams for projection onto two substrates.

REFERENCES:
patent: 4090189 (1978-05-01), Fisler
patent: 4230408 (1980-10-01), Nigg
patent: 4653903 (1987-03-01), Torigoe et al.
patent: 5290992 (1994-03-01), Lin et al.
patent: 6238852 (2001-05-01), Klosner
patent: 20030218730 (2003-11-01), Murakami et al.
patent: 199 50 135 (2001-04-01), None
patent: 0 507 589 (1992-10-01), None
patent: 0 507 589 (1992-10-01), None
patent: 1 107 064 (2001-06-01), None
Kassakian, Schlecht, Verghese, “Principles of Power Electronics,” 1991, Addison-Wesley Publishing Company (Reading, Massachusetts), Doc. No. XP-002250999 pertinent pp.: 127; pertinent figures: 6.22(a).
Linear Technology Corporation, “LT1932—Final Electrical Specifications; Constant-Current DC/DC LED Driver in ThinSOT,” Doc. No. XP-002250997, Jul. 2001; found at Internet address <URL:http:www.linear.com/pdf/1932i.pdf> on Aug. 11, 2003; pertinent pp.: 1, 4, 6, 7; pertinent figures: 1, 5.
Maxim Integrated Products, “MAX1848—White LED Step-Up Converter in SOT23,” Doc. No. XP-002250998, May 2001; found at Internet address <URL:http://web.archive.org/web/20010614052210/http://pdfserv.maxim-ic.com/arpdf/MAX1848.pdf> on Aug. 11, 2003; pertinent pp.: 7; pertinent figures: 2.

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