Lithographic apparatus and device manufacturing method

Details Lithographic apparatus and device manufacturing method Lithographic apparatus and device manufacturing method

2005-05-10

2005-05-10

Nguyen, Henry Hung (Department: 2851)

Photocopying

Projection printing and copying cameras

Detailed holder for photosensitive paper

C355S075000

Reexamination Certificate

active

06891600

ABSTRACT:
A coil for use in an actuator in a lithographic projection apparatus. The coil is formed of a strip of electrically conducting sheet-material that is wound round a winding axis. Respective turns of the strip of sheet-material are separated by an electrically non-conducting layer.

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Beckert et al., “Development of a vertical wafer stage for high-vacuum applications,”Microelectronic Engineering57-58:207-212 (2001).

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