Lithographic apparatus and device manufacturing method

Details Lithographic apparatus and device manufacturing method Lithographic apparatus and device manufacturing method

2005-05-24

2005-05-24

Mathews, Alan (Department: 2851)

Photocopying

Projection printing and copying cameras

Detailed holder for photosensitive paper

C053S075000, C053S077000

Reexamination Certificate

active

06897945

ABSTRACT:
A lithographic apparatus includes an illumination system for providing a beam of radiation, an article support for supporting a flat article to be placed in a beam path of the beam of radiation on the article support, a backfill gas feed arranged in the article support for feeding backfill gas to a backside of the article when supported by the article support, and a clamp for clamping the article against the article support during projection. According to one aspect of the invention, the apparatus includes a controller for controlling the clamp and/or the backfill gas feed pressure so as to release the clamp prior to reducing the backfill gas feed pressure.

REFERENCES:
patent: 5923408 (1999-07-01), Takabayashi
patent: 6496350 (2002-12-01), Fujiwara
patent: 6628503 (2003-09-01), Sogard
patent: 20020067585 (2002-06-01), Fujiwara
patent: 20020159217 (2002-10-01), Tsuruta et al.
patent: 20040079518 (2004-04-01), del Puerto et al.
patent: 1 241 706 (2002-09-01), None
patent: 1 411 391 (2004-04-01), None

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