Photocopying – Projection printing and copying cameras – Illumination systems or details
Reexamination Certificate
2008-07-22
2008-07-22
Mathews, Alan A (Department: 2851)
Photocopying
Projection printing and copying cameras
Illumination systems or details
C355S053000, C355S077000
Reexamination Certificate
active
07403265
ABSTRACT:
An apparatus and method are used to form patterns on a substrate. The comprise a projection system, a patterning device, a low-pass filter, and a data manipulation device. The projection system projects a beam of radiation onto the substrate as an array of sub-beams of radiation. The patterning device modulates the sub-beams of radiation to substantially produce a requested dose pattern on the substrate. The low-pass filter operates on pattern data derived from the requested dose pattern in order to form a frequency-clipped target dose pattern that comprises only spatial frequency components below a selected threshold frequency. The data manipulation device produces a control signal comprising spot exposure intensities to be produced by the patterning device, based on a direct algebraic least-squares fit of the spot exposure intensities to the frequency-clipped target dose pattern. In various examples, filters for pattern sharpening, image log slope control, and/or CD biasing can also be used.
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Baselmans Johannes Jacobus Matheus
Tinnemans Patricius Aloysius Jacobus
ASML Netherlands B.V.
Mathews Alan A
Sterne Kessler Goldstein & Fox P.L.L.C.
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