Photocopying – Projection printing and copying cameras – With temperature or foreign particle control
Reexamination Certificate
2008-01-01
2008-01-01
Mathews, Alan (Department: 2851)
Photocopying
Projection printing and copying cameras
With temperature or foreign particle control
C355S053000, C355S067000, C355S077000
Reexamination Certificate
active
07315346
ABSTRACT:
A lithographic projection apparatus is disclosed. The apparatus includes a support structure constructed to support a patterning structure. The patterning structure is adapted to pattern a beam of radiation according to a desired pattern. The apparatus also includes a substrate holder that is constructed to hold a substrate, a projection system that is constructed and arranged to project the patterned beam onto a target portion of the substrate, and a downstream radical source that is connected to a gas supply and is configured to provide a beam of radicals onto a surface to be cleaned.
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Bakker Levinus Pieter
Bisschops Theodorus Hubertus Josephus
Jonkers Jeroen
Kroon Mark
Maas Adrianus Johannes Henricus
ASML Netherlands B.V.
Mathews Alan
Pillsbury Winthrop Shaw & Pittman LLP
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