Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate
2008-05-27
2008-05-27
Nguyen, Henry Hung (Department: 2851)
Photocopying
Projection printing and copying cameras
Step and repeat
C355S030000
Reexamination Certificate
active
07379155
ABSTRACT:
A lithographic apparatus is disclosed including a liquid supply system configured to at least partly fill a space between the projection system and the substrate with a liquid, an outlet configured to remove a mixture of liquid and gas passing through a gap between a liquid confinement structure of the liquid supply system and the substrate, and an evacuation system configured to draw the mixture through the outlet, the evacuation system having a separator tank arranged to separate liquid from gas in the mixture and a separator tank pressure controller, connected to a non-liquid-filled region of the separator tank, configured to maintain a stable pressure within the non-liquid-filled region.
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De Graaf Roelof Frederick
Donders Sjoerd Nicolaas Lambertus
Hoogendam Christiaan Alexander
Mertens Jeroen Johannes Sophia Maria
Teunissen Franciscus Johaannes Herman Maria
ASML Netherlands B.V.
Nguyen Henry Hung
Pillsbury Winthrop Shaw & Pittman LLP
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