Photocopying – Projection printing and copying cameras – Illumination systems or details
Reexamination Certificate
2011-03-01
2011-03-01
Kim, Peter B (Department: 2882)
Photocopying
Projection printing and copying cameras
Illumination systems or details
C355S053000
Reexamination Certificate
active
07898644
ABSTRACT:
By proper selection of illumination configuration, mask transmission, and mask bias, complex patterns of contact holes may be imaged with sufficient latitude for manufacturing at minimum half-pitches of k1=0.40 or below. In an embodiment, a method of transferring an image of a mask pattern onto a substrate with a lithographic apparatus is presented. The method includes illuminating a mask pattern of an attenuated phase shift mask with an illumination configuration including on-axis and off-axis components, the off-axis component of the illumination being an annular illumination extending near a pupil edge, and projecting an image of the illuminated mask pattern onto the substrate.
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ASML Netherlands B.V.
Kim Peter B
Sterne Kessler Goldstein & Fox P.L.L.C.
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