Photocopying – Projection printing and copying cameras – With temperature or foreign particle control
Reexamination Certificate
2010-03-01
2011-10-04
Nguyen, Hung Henry (Department: 2882)
Photocopying
Projection printing and copying cameras
With temperature or foreign particle control
C355S053000
Reexamination Certificate
active
08031325
ABSTRACT:
A porous member is used in a liquid removal system of an immersion lithographic projection apparatus to smooth uneven flows. A pressure differential across the porous member may be maintained at below the bubble point of the porous member so that a single-phase liquid flow is obtained. Alternatively, the porous member may be used to reduce unevenness in a two-phase flow.
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Belfroid Stefan Philip Christiaan
Cox Henrikus Herman Marie
De Graaf Roelof Frederik
Donders Sjoerd Nicolaas Lambertus
Hoogendam Christiaan Alexander
ASML Holding N.V.
ASML Netherlands B.V.
Nguyen Hung Henry
Pillsbury Winthrop Shaw & Pittman LLP
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