Lithographic apparatus and device manufacturing method

Details Lithographic apparatus and device manufacturing method Lithographic apparatus and device manufacturing method

2006-07-07

2011-10-11

Kim, Peter B (Department: 2882)

Photocopying

Projection printing and copying cameras

Step and repeat

C355S069000

Reexamination Certificate

active

08035798

ABSTRACT:
A lithographic apparatus is provided that has a sensor at substrate level, the sensor including a radiation receiver, a transmissive plate supporting the radiation receiver, and a radiation detector, wherein the sensor is arranged to avoid loss of radiation between the radiation receiver and a final element of the radiation detector.

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