Radiation imagery chemistry: process – composition – or product th – Erasable imaging
Reexamination Certificate
2006-05-24
2010-06-15
Walke, Amanda C. (Department: 1795)
Radiation imagery chemistry: process, composition, or product th
Erasable imaging
C430S270150, C430S273100, C430S394000, C430S396000, C430S320000, C430S321000, C430S945000
Reexamination Certificate
active
07736825
ABSTRACT:
A device manufacturing system and method are used to perform multiple exposures utilizing a resettable or reversible contrast enhancing layer. A radiation sensitive layer is formed on a substrate. A resettable or reversible contrast enhancing layer is formed on the radiation sensitive layer. The resettable or reversible contrast enhancing layer is bleached with a first pattern. The first pattern formed in the resettable or reversible contrast enhancing layer is transferred to the radiation sensitive layer. The resettable or reversible contrast enhancing layer is reset to unbleach the resettable or reversible contrast enhancing layer. The resettable or reversible contrast enhancing layer is bleached with a second pattern. The second pattern formed in the resettable or reversible contrast enhancing layer is transferred to the radiation sensitive layer.
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ASML Holding N.V.
Sterne Kessler Goldstein & Fox P.L.L.C.
Walke Amanda C.
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