Lithographic apparatus and device manufacturing method...

Image analysis – Image compression or coding

Reexamination Certificate

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Details

C382S276000, C358S426010, C341S050000

Reexamination Certificate

active

07826672

ABSTRACT:
A system is provided that includes a device having an emissive portion, a memory, and a dictionary decompressor. The device having an emissive portion is configured to produce a patterned beam. The memory is configured to store a compressed representation of a requested dose pattern, comprising two groups of repeating pattern features, to be formed on a surface by the patterned beam. The dictionary decompressor at least partially decompresses the compressed representation. The dictionary decompressor comprises a first dictionary memory configured to store pattern data corresponding to a first group of the two groups of repeating pattern features and a second dictionary memory configured to store pattern data corresponding to a second group of the two groups of repeating pattern features. The repeating pattern features in the first group have one or more differing characteristics than the repeating pattern features in the second group. Related methods are also provided.

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Non-Final Rejection mailed Sep. 12, 2008 for U.S. Appl. No. 11/214,055, 16 pgs.
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