Photocopying – Projection printing and copying cameras – With temperature or foreign particle control
Reexamination Certificate
2005-06-28
2010-11-16
Kim, Peter B (Department: 2851)
Photocopying
Projection printing and copying cameras
With temperature or foreign particle control
C355S053000
Reexamination Certificate
active
07834974
ABSTRACT:
A gas knife configured to dry a surface in an immersion lithographic apparatus is optimized to remove liquid by ensuring that a pressure gradient is built up in the liquid film on the surface being dried.
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Donders Sjoerd Nicolaas Lambertus
Hoogendam Christiaan Alexander
Kate Nicolaas Ten
Kemper Nicolaas Rudolf
Shulepov Sergei
ASML Netherlands B.V.
Kim Peter B
Pillsbury Winthrop Shaw & Pittman LLP
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