Lithographic apparatus and device manufacturing method

Details Lithographic apparatus and device manufacturing method Lithographic apparatus and device manufacturing method

2008-06-20

2010-12-14

Mathews, Alan A (Department: 2882)

Photocopying

Projection printing and copying cameras

With temperature or foreign particle control

C355S053000, C355S077000, C430S030000

Reexamination Certificate

active

07852457

ABSTRACT:
In an immersion lithography apparatus, ultrasonic waves are used to atomize liquid on a surface of the substrate.

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