Lithographic apparatus and device manufacturing method

Details Lithographic apparatus and device manufacturing method Lithographic apparatus and device manufacturing method

2006-05-05

2010-06-08

Epps, Georgia Y (Department: 2878)

Photocopying

Projection printing and copying cameras

Detailed holder for original

C430S005000

Reexamination Certificate

active

07733463

ABSTRACT:
A support constructed to support a patterning object, the patterning object being capable of imparting the radiation beam with a pattern in its cross-section to form a patterned radiation beam, is disclosed, wherein the support comprises a plurality of structures having a plurality of local contact areas, respectively, on which the patterning object is disposed, in use, and a clamp configured to clamp the patterning object to the plurality of contact areas, wherein each structure is configured so that a local shear stiffness of each local contact area is substantially balanced with a local friction limit at each local contact area, respectively.

REFERENCES:
patent: 6172738 (2001-01-01), Korenaga et al.
patent: 6841312 (2005-01-01), Kalk
patent: 2003/0197841 (2003-10-01), Araki et al.

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