Radiation imagery chemistry: process – composition – or product th – Registration or layout process other than color proofing
Reexamination Certificate
2006-03-21
2010-02-02
Young, Christopher G (Department: 1795)
Radiation imagery chemistry: process, composition, or product th
Registration or layout process other than color proofing
C430S030000, C430S311000, C430S322000
Reexamination Certificate
active
07655367
ABSTRACT:
A method and apparatus make use of data representing changes in wavelength of a radiation source to provide control of focal plane position or to provide correction of sensor data. In the first aspect, the wavelength variation data is provided to control systems that control focus by moving apparatus components including, for example, the mask table, the substrate table or optical elements of the projection optical system. In the second aspect, variation data is used in correcting, e.g., focal plane position data measured by an inboard sensor, such as a transmitted image sensor. The two aspects may be combined in a single apparatus or may be used separately.
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Buurman Erik Petrus
Castenmiller Thomas Josephus Maria
Haast Marc Antonius Maria
Moest Bearrach
Teeuwsen Johannes Wilhelmus Maria Cornelis
ASML Netherlands B.V.
Pillsbury Winthrop Shaw & Pittman LLP
Young Christopher G
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