Lithographic apparatus and device manufacturing method

Details Lithographic apparatus and device manufacturing method Lithographic apparatus and device manufacturing method

2007-07-05

2010-10-19

Nguyen, Hung Henry (Department: 2882)

Photocopying

Projection printing and copying cameras

With developing

C355S053000, C355S072000, C355S077000, C700S100000

Reexamination Certificate

active

07817241

ABSTRACT:
A lithographic apparatus is disclosed that includes a utility substrate storage configured to hold a utility substrate, and a utility substrate scheduling unit configured to schedule the loading of a utility substrate in a flow of substrates in the lithographic apparatus.

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patent: 7557900 (2009-07-01), Shiraishi
patent: 2003/0186546 (2003-10-01), Wollstein et al.
patent: 2004/0069226 (2004-04-01), Yoshida et al.
patent: 2004/0249494 (2004-12-01), Kobayashi et al.
patent: 2005/0058446 (2005-03-01), Plug
patent: WO 2005076323 (2005-08-01), None

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