Lithographic apparatus and device manufacturing method

Details Lithographic apparatus and device manufacturing method Lithographic apparatus and device manufacturing method

2005-12-09

2009-12-01

Berman, Jack I (Department: 2881)

Radiant energy

Irradiation of objects or material

Irradiation of semiconductor devices

C250S492100

Reexamination Certificate

active

07626181

ABSTRACT:
Apparatus and methods for compensating for the movement of a substrate in a lithographic apparatus during a pulse of radiation include providing a pivotable mirror configured to move a patterned projection beam incident on the substrate in synchronism with the substrate.

REFERENCES:
patent: 3742234 (1973-06-01), Laakmann
patent: 3811748 (1974-05-01), Treuthart
patent: 3936193 (1976-02-01), Auth
patent: 4025203 (1977-05-01), Lee
patent: 4155630 (1979-05-01), Ih
patent: 4327975 (1982-05-01), Harris
patent: 4491383 (1985-01-01), Pera et al.
patent: 4577932 (1986-03-01), Gelbart
patent: 4668080 (1987-05-01), Gale et al.
patent: 4708420 (1987-11-01), Liddiard
patent: 4726671 (1988-02-01), Ahmad et al.
patent: 4732440 (1988-03-01), Gadhok
patent: 4851978 (1989-07-01), Ichihara
patent: 4861125 (1989-08-01), Vaught
patent: 4970546 (1990-11-01), Suzuki et al.
patent: 5121138 (1992-06-01), Schermer et al.
patent: 5229872 (1993-07-01), Mumola
patent: 5296891 (1994-03-01), Vogt et al.
patent: 5430571 (1995-07-01), Witteveen
patent: 5500736 (1996-03-01), Koitabashi et al.
patent: 5523193 (1996-06-01), Nelson
patent: 5530482 (1996-06-01), Gove et al.
patent: 5579147 (1996-11-01), Mori et al.
patent: 5677703 (1997-10-01), Bhuva et al.
patent: 5684566 (1997-11-01), Stanton
patent: 5808797 (1998-09-01), Bloom et al.
patent: 5949544 (1999-09-01), Manning
patent: 5969441 (1999-10-01), Loopstra et al.
patent: 5982553 (1999-11-01), Bloom et al.
patent: 6046792 (2000-04-01), Van Der Werf et al.
patent: 6133986 (2000-10-01), Johnson
patent: 6177980 (2001-01-01), Johnson
patent: 6204875 (2001-03-01), De Loor et al.
patent: 6249381 (2001-06-01), Suganuma
patent: 6268904 (2001-07-01), Mori et al.
patent: 6317169 (2001-11-01), Smith
patent: 6379867 (2002-04-01), Mei et al.
patent: 6556279 (2003-04-01), Meisburger et al.
patent: 6633366 (2003-10-01), de Jager et al.
patent: 6687041 (2004-02-01), Sandstrom
patent: 6707534 (2004-03-01), Bjorklund et al.
patent: 6731376 (2004-05-01), Markle
patent: 6747783 (2004-06-01), Sandstrom
patent: 6753947 (2004-06-01), Meisburger et al.
patent: 6765712 (2004-07-01), Van Dijsseldonk et al.
patent: 6795169 (2004-09-01), Tanaka et al.
patent: 6798494 (2004-09-01), Naulleau
patent: 6803938 (2004-10-01), Turner
patent: 6806897 (2004-10-01), Kataoka et al.
patent: 6811953 (2004-11-01), Hatada et al.
patent: 6831765 (2004-12-01), Yasuda et al.
patent: 7015491 (2006-03-01), Eurlings et al.
patent: 7098871 (2006-08-01), Tegreene et al.
patent: 7283210 (2007-10-01), Hazelton
patent: 7367931 (2008-05-01), Barclay et al.
patent: 2001/0010536 (2001-08-01), Katzir et al.
patent: 2001/0048515 (2001-12-01), Mei
patent: 2003/0006360 (2003-01-01), Hatam-Tabrizi et al.
patent: 2003/0123040 (2003-07-01), Almogy
patent: 2004/0001265 (2004-01-01), Pesik
patent: 2004/0041104 (2004-03-01), Liebregts et al.
patent: 2004/0076203 (2004-04-01), Kaminsky et al.
patent: 2004/0130561 (2004-07-01), Jain
patent: 2004/0141166 (2004-07-01), Bleeker et al.
patent: 2005/0007572 (2005-01-01), George et al.
patent: 2005/0116038 (2005-06-01), Lewis et al.
patent: 2006/0018025 (2006-01-01), Sharon et al.
patent: 2006/0061749 (2006-03-01), Bleeker et al.
patent: 2006/0110665 (2006-05-01), Bleeker et al.
patent: 2007/0150779 (2007-06-01), Visser et al.
patent: 2007/0162781 (2007-07-01), Visser et al.
patent: 2008/0013097 (2008-01-01), E. del Puerto
patent: 823662 (1998-02-01), None
patent: 1 115 031 (2001-07-01), None
patent: 1 469 348 (2004-10-01), None
patent: 1 659 451 (2006-05-01), None
patent: 1 795 966 (2007-06-01), None
patent: WO 98/33096 (1998-07-01), None
patent: WO 98/38597 (1998-09-01), None
patent: WO 98/40791 (1998-09-01), None
patent: WO 03/071353 (2003-08-01), None
European Search Report dated Oct. 1, 2003.
European Search Report issued for European Patent Application No. 06256076.8-1226, dated May 7, 2007.
Extended European Search Report issued for European Patent Application No. 07252547.0-1226/ 1870773, dated Jun. 23, 2009.
Response to Written Opinion dated Nov. 4, 2008 for European Application No. 07252547, 3 pgs.
Non-Final Rejection mailed Dec. 16, 2008 for U.S. Appl. No. 11/473,326, filed Jun. 23, 2006, 27 pgs.
Non-Final Rejection mailed Dec. 11, 2008 for U.S. Appl. No. 11/371,232, filed Mar. 9, 2006, 22 pgs.
Final Rejection mailed Apr. 7, 2009 for U.S. Appl. No. 11/371,232, filed Mar. 9, 2006, 19 pgs.
Final Rejection mailed May 12, 2009 for U.S. Appl. No. 11/473,326, filed Jun. 23, 2006, 31 pgs.

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