Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate
2005-11-01
2009-06-30
Vanore, David A. (Department: 2881)
Radiant energy
Irradiation of objects or material
Irradiation of semiconductor devices
C250S442110, C355S053000
Reexamination Certificate
active
07554105
ABSTRACT:
A lithographic apparatus includes a projection system mounted on a reference frame, which in turn is mounted on a base which supports the apparatus. Vibrations and displacement errors in the base are filtered through two sets of isolation mounts operatively between the base and reference frame and between the reference frame and a projection frame of the projection system and therefore disturbance of the projection system is reduced.
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Bartray Pertrus Rutgerus
Dries Johan Juliana
Franken Dominicus Jacobus Petrus A.
Loopstra Erik Roelof
Renkens Michael Jozef Mathijs
ASML Netherlands B.V.
Johnston Phillip A.
Sterne, Kessler, Goldstein & Fox P.L.L.C
Vanore David A.
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