Photocopying – Projection printing and copying cameras – Detailed holder for photosensitive paper
Reexamination Certificate
2006-07-24
2009-12-08
Lee, Diane I (Department: 2851)
Photocopying
Projection printing and copying cameras
Detailed holder for photosensitive paper
C310S010000
Reexamination Certificate
active
07630059
ABSTRACT:
A control system to control a position parameter of a stage in a lithographic apparatus includes a stage controller to control a position parameter of the stage in at least a first direction. The control system includes a disturbance torque estimator to estimate a disturbance torque on the stage, the disturbance torque about an axis extending in a second direction, the second direction being substantially perpendicular to the first direction. The control system includes a correction signal calculator, the correction signal calculator provided with the estimated disturbance torque and a signal representative of a position of the stage in a third direction, the third direction being substantially perpendicular to the first and second directions. The correction signal calculator determines a feedforward correction signal to correct a position error of the stage in the first direction due to the disturbance torque, the feedforward correction signal to be fed to the stage.
REFERENCES:
patent: 6504162 (2003-01-01), Binnard et al.
patent: 2001/0002303 (2001-05-01), Yuan
patent: 2005/0110970 (2005-05-01), Butler
patent: 2006/0119829 (2006-06-01), Cox et al.
European Search Report issued on Jun. 26, 2009 in European Application No. 07075633.3.
Butler Hans
Houkes Martijn
Simons Wilhelmus Franciscus Johannes
Van Der Toorn Jan-Gerard Cornelis
Asfaw Mesfin T
ASML Netherlands B.V.
Lee Diane I
Pillsbury Winthrop Shaw & Pittman LLP
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