Lithographic apparatus and device manufacturing method

Details Lithographic apparatus and device manufacturing method Lithographic apparatus and device manufacturing method

2004-05-21

2009-02-03

Mathews, Alan A (Department: 2851)

Photocopying

Projection printing and copying cameras

Focus or magnification control

C355S030000, C355S053000, C355S072000, C355S077000

Reexamination Certificate

active

07486381

ABSTRACT:
An immersion lithographic apparatus includes a liquid supply system member configured to contain a liquid in a space between a projection system of the lithographic apparatus and the substrate and a liquid supply system member compensator arranged to compensate an interaction between the liquid supply system member and substrate table.

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