Lithographic apparatus and device manufacturing method

Details Lithographic apparatus and device manufacturing method Lithographic apparatus and device manufacturing method

2005-11-01

2009-12-15

Kim, Peter B (Department: 2851)

Photocopying

Projection printing and copying cameras

Detailed holder for original

C355S072000, C355S053000

Reexamination Certificate

active

07633600

ABSTRACT:
A lithographic apparatus has a patterning support holding a patterning device. At least one position sensor measures a position of the patterning device relative to the patterning support, and generates a measuring signal. A positioning device controls a position of the patterning support on the basis of the measuring signal input to the positioning device. In a corresponding device manufacturing method a patterning support is provided. A patterning device is held on the patterning support. The patterning support is moved along a line of movement. A position of the patterning device relative to the patterning support is measured, and a position of the patterning support is controlled on the basis of the measurement of the position of the patterning device relative to the patterning support. Thus, the controlling of the position of the patterning support compensates for a slip of the patterning device relative to the patterning support.

REFERENCES:
patent: 6040096 (2000-03-01), Kakizaki et al.
patent: 2002/0001082 (2002-01-01), Akimoto et al.
patent: 2005/0117142 (2005-06-01), Heerens et al.
patent: 2007/0159616 (2007-07-01), Van De Ven et al.
patent: 2006100590 (2006-04-01), None

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