Lithographic apparatus and device manufacturing method

Details Lithographic apparatus and device manufacturing method Lithographic apparatus and device manufacturing method

2004-05-18

2009-11-10

McPherson, John A (Department: 1795)

Optical: systems and elements

Lens

Fluid

C355S053000, C355S030000, C430S311000

Reexamination Certificate

active

07616383

ABSTRACT:
A lithographic projection apparatus is disclosed in which a liquid supply system provides a liquid between the projection system and the substrate. An active drying station is provided to actively remove the liquid from the substrate W or other objects after immersion of all or part of a surface of the substrate W or other objects.

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