Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate
2004-09-09
2009-02-17
Mullins, Burton (Department: 2834)
Photocopying
Projection printing and copying cameras
Step and repeat
C250S492200, C355S072000, C310S012060
Reexamination Certificate
active
07492440
ABSTRACT:
A substrate or a patterning device used in a lithographic apparatus and a lithographic device manufacturing method are presented. The substrate and patterning device are aligned with respect to a patterning beam and are movably supported by a support. Resonances in said support, however, may render the manufactured device unusable and/ or may render the control system complex. Therefore an actuator assembly frame with flexible coupling devices coupled to the support is provided with a number of actuators configured to move the support in a number of degrees of freedom. Thus, the resonances are damped by the flexible coupling devices resulting in a larger bandwidth for the control system and thus enabling a better position accuracy of the support.
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Buis Edwin Johan
Cox Henrikus Herman Marie
Gilissen Noud Jan
Maria Zaal Koen Jacobus Johannes
Van Der Schoot Harmen Klaas
ASML Netherlands B.V.
Mullins Burton
Pillsbury Winthrop Shaw & Pittman LLP
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