Image analysis – Image compression or coding
Reexamination Certificate
2005-08-30
2009-10-20
Mariam, Daniel G (Department: 2624)
Image analysis
Image compression or coding
C382S276000, C358S426010, C341S050000
Reexamination Certificate
active
07606430
ABSTRACT:
A lithographic apparatus comprises an array of individually controllable elements that modulate a beam of radiation, a compressed-pattern memory that stores a compressed representation of a requested dose pattern to be formed on a substrate by the modulated beam, and a dictionary decompressor that at least partially decompresses the compressed representation. The dictionary decompressor comprises an external dictionary memory, a first dictionary decoder that at least partially decompresses at least a part of the compressed representation by extracting, from the external dictionary memory, portions of pattern data corresponding to references to the external dictionary memory contained in the compressed representation, and a second dictionary decoder having an internal dictionary memory, the second dictionary decoder that at least partially decompresses at least a part of the compressed representation by extracting, from the internal dictionary memory, portions of pattern data corresponding to references to the internal dictionary memory contained in compressed representation.
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Kessels Lambertus Gerardus Maria
Tinnemans Patricius Aloysius Jacobus
Van Engelen Remco Johannes
ASML Netherlands B.V.
Mariam Daniel G
Seth Manav
Sterne Kessler Goldstein & Fox P.L.L.C.
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