Radiation imagery chemistry: process – composition – or product th – Including control feature responsive to a test or measurement
Reexamination Certificate
2004-07-23
2009-02-17
Young, Christopher G (Department: 1795)
Radiation imagery chemistry: process, composition, or product th
Including control feature responsive to a test or measurement
C430S311000, C430S322000
Reexamination Certificate
active
07491478
ABSTRACT:
Control of exposures is based at least in part on the relative contrast loss for a source spectrum and an pattern to be projected or an average absolute detuning of the source.
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Buurman Erik Petrus
De Klerk J. W.
Finders Jozef Maria
Straaijer Alexander
ASML Netherlands B.V.
Pillsbury Winthrop Shaw & Pittman LLP
Young Christopher G
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