Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate
2005-02-18
2008-12-02
Kim, Peter B (Department: 2851)
Photocopying
Projection printing and copying cameras
Step and repeat
C359S290000
Reexamination Certificate
active
07460208
ABSTRACT:
A lithographic apparatus provided with an array of individually controllable elements that is detachably mounted to mounting points on a support frame of the lithographic apparatus.
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Bleeker Arno Jan
Franken Dominicus Jacobus Petrus Adrianus
Hoeks Martinus Hendricus Hendricus
Kessels Lambertus Gerardus Maria
Sandström Tobrjörn
ASML Netherlands B.V.
Kim Peter B
Sterne, Kessler, Goldstein & Fox P.L.L.C
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