Photocopying – Projection printing and copying cameras – With temperature or foreign particle control
Reexamination Certificate
2004-12-03
2008-11-04
Mathews, Alan A (Department: 2851)
Photocopying
Projection printing and copying cameras
With temperature or foreign particle control
C355S053000, C355S072000, C355S077000
Reexamination Certificate
active
07446850
ABSTRACT:
An immersion lithographic apparatus is disclosed having comprising a pump and buffer volume configured to remove remaining liquid from a substrate, the pump and the buffer volume configured to generate a vacuum cleaning gas flow near the substrate by gas suction into the buffer volume. In an embodiment, since gas flow is needed only a limited amount of time (ordinarily less than 5%), evacuation may be performed using only a moderately powered vacuum pump. In addition or alternatively, the buffer volume may be used as a backup volume buffer configured to provide gas vacuum suction, e.g., in case of a vacuum supply outage.
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De Groot Ton
Hannen Gerardus Everardus Marie
Hultermans Ronald Johannes
Verspay Jacobus Johannus Leonardus Hendricus
ASML Netherlands B.V.
Mathews Alan A
Pillsbury Winthrop Shaw & Pittman LLP
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