Lithographic apparatus and device manufacturing method

Details Lithographic apparatus and device manufacturing method Lithographic apparatus and device manufacturing method

2005-06-30

2008-08-05

Nguyen, Hung Henry (Department: 2851)

Photocopying

Projection printing and copying cameras

Detailed holder for photosensitive paper

C355S053000

Reexamination Certificate

active

07408624

ABSTRACT:
A lithographic apparatus includes a substrate table constructed to hold a first substrate of a first type, the first substrate having a polished surface; and a projection system configured to project a patterned radiation beam onto a target portion of a substrate. The polished surface supports a second substrate of a second type and the projection system is configured to project the patterned radiation beam onto the second substrate.

REFERENCES:
patent: 6164633 (2000-12-01), Mulligan et al.
patent: 6583858 (2003-06-01), van Schaik et al.
patent: 6822730 (2004-11-01), Krikhaar et al.
patent: 2004/0145751 (2004-07-01), Binnard
patent: 2005/0117203 (2005-06-01), Dieckmann et al.

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