Photocopying – Projection printing and copying cameras – Distortion introducing or rectifying
Reexamination Certificate
2004-12-28
2008-10-14
Nguyen, Hung Henry (Department: 2851)
Photocopying
Projection printing and copying cameras
Distortion introducing or rectifying
C355S053000
Reexamination Certificate
active
07436484
ABSTRACT:
A lithographic apparatus is disclosed having a deformable lens element through which a patterned radiation beam is arranged to pass before reaching a substrate and having a deformable lens actuator configured to transmit a combination of a force substantially parallel to the optical axis of the projection system and a localized torque about an axis substantially perpendicular to the optical axis independently at a plurality of sub-regions on the deformable lens element.
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Franken Dominicus Jacobus Petrus Adrianus
Loopstra Erik Roelof
Ravensbergen Marius
Van Der Wijst Marc Wilhelmus Maria
ASML Netherlands B.V.
Nguyen Hung Henry
Pillsbury Winthrop Shaw & Pittman LLP
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