Photocopying – Projection printing and copying cameras – Detailed holder for photosensitive paper
Reexamination Certificate
2005-08-02
2008-09-09
Nguyen, Hung Henry (Department: 2851)
Photocopying
Projection printing and copying cameras
Detailed holder for photosensitive paper
C355S053000
Reexamination Certificate
active
07423732
ABSTRACT:
A lithography system comprises an illumination system that supplies radiation and a projection system comprising an optical system and a patterning device located at a pupil plane. The patterning device patterns the radiation and the optical system projects the patterned radiation onto a target portion of a substrate. In one example, an additional patterning device is located at an object plane of the lithography system and patterns the radiation before the patterning device at the pupil plane.
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Latypov Azat M.
Lipson Matthew
ASML Holding N.V.
Nguyen Hung Henry
Sterne Kessler Goldstein & Fox P.L.L.C.
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