Photocopying – Projection printing and copying cameras – Detailed holder for original
Reexamination Certificate
2005-06-24
2008-05-13
Fuller, Rodney (Department: 2862)
Photocopying
Projection printing and copying cameras
Detailed holder for original
C355S072000
Reexamination Certificate
active
07372549
ABSTRACT:
A lithographic apparatus is disclosed that has a support structure constructed to support a patterning object, the patterning object being capable of imparting a radiation beam with a pattern in its cross-section to form a patterned radiation beam, a substrate table constructed to hold a substrate, or both, wherein the support structure, the substrate table, or both, has a contact surface with which the patterning object, the substrate, or both, are configured to be in contact, respectively, the contact surface having a plurality of sub-contact surfaces to increase a mutual adhesion between the support structure and the patterning object, the substrate table and the substrate, or both.
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ASML Netherlands B.V.
Fuller Rodney
Pillsbury Winthrop Shaw & Pittman LLP
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