Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate
2008-07-08
2008-07-08
Kim, Peter B (Department: 2851)
Photocopying
Projection printing and copying cameras
Step and repeat
C355S067000
Reexamination Certificate
active
11312649
ABSTRACT:
Lithographic apparatus includes an illumination system for conditioning a radiation beam, a support for supporting a patterning device for imparting a cross-sectional pattern to the radiation beam to form a patterned radiation beam, and a substrate table for holding a substrate. A projection system is provided for projecting the patterned radiation beam onto a target portion of the substrate. Conditioning optics and an adjustable aperture are provided to condition the radiation beam from the illumination system, and a detector is provided to detect the size and divergence of the radiation beam propagated through the aperture and to provide a feedback signal in dependence thereon. An actuator serves to effect adjustment of at least one of the optics and the aperture to vary at least one optical characteristic of the radiation beam, and a control device is provided to control the actuator in response to the feedback signal from the detector.
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patent: 5991016 (1999-11-01), Irie
patent: 6870603 (2005-03-01), Teeuwen
patent: 2004/0114122 (2004-06-01), Teeuwen
patent: 2005/0270608 (2005-12-01), Shiozawa et al.
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