Lithographic apparatus and device manufacturing method

Photocopying – Projection printing and copying cameras – Step and repeat

Reexamination Certificate

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C355S055000, C355S067000, C355S071000

Reexamination Certificate

active

11013939

ABSTRACT:
A system and method are provided including different moveable lenses within a projection system that can be placed in the path of a radiation beam to change a magnification of the projection system. By changing the magnification of the projection system an area of a substrate exposed per pixel can be adjusted, and a throughput of the system optimized.

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European Search Report, dated Apr. 19, 2006, for European Patent Application No. 05257490.2, 8 pages.

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